MEMS Electroceramic بر اساس: ساخت تکنولوژی و نرم افزار Electroceramic-Based MEMS:Fabrication-Technology and Applications
- نوع فایل : کتاب
- زبان : انگلیسی
- نویسنده : N. Setter
- چاپ و سال / کشور: 2005
- شابک / ISBN : 0387233105, 9780387233109, 9780387233192
Description
The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.
