منابع یون صنعتی: برادبیم Gridless یون فناوری منبع Industrial Ion Sources: Broadbeam Gridless Ion Source Technology
- نوع فایل : کتاب
- زبان : انگلیسی
- نویسنده : Prof. Viacheslav V. Zhurin(auth.)
- چاپ و سال / کشور: 2011
- شابک / ISBN : 9783527410293, 9783527635726
Description
Due to the large number of uses of ion sources in academia and industry, those who utilize these sources need up to date and coherent information to keep themselves abreast of developments and options, and to chose ideal solutions for quality and cost-effectiveness. This book, written by an author with a strong industrial background and excellent standing, is the comprehensive guide users and developers of ion sources have been waiting for. Providing a thorough refresher on the physics involved, this resource systematically covers the source types, components, and the operational parameters.Content: Chapter 1 Hall?Current Ion Sources (pages 1–27): Chapter 2 Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters (pages 29–51): Chapter 3 Oscillations and Instabilities in Hall?Current Ion Sources (pages 53–65): Chapter 4 Optimum Operation of Hall?Current Ion Sources (pages 67–83): Chapter 5 Cathode Neutralizers for Ion Sources (pages 85–147): Chapter 6 Industrial Gridless Broad?Beam Ion Source Producers, Problems and the Need for Their Standardization (pages 149–196): Chapter 7 Operation of Industrial Ion Sources with Reactive Gases (pages 197–208): Chapter 8 Ion Beam and Radiation Impact on Substrate Heating (pages 209–222): Chapter 9 Ion Beam Energy and Current (pages 223–240): Chapter 10 Plasma Optical Systems (pages 241–254): Chapter 11 Ion and Plasma Sources for Science and Technology (pages 255–267): Chapter 12 Ion Assist, and its Different Applications (pages 269–286): Chapter 13 Magnetron with Non?Equipotential Cathode (pages 287–307):
